CMOS-Compatible Protonic Programmable Resistor Based on Phosphosilicate Glass Electrolyte for Analog Deep Learning

Ion intercalation based programmable resistors have emerged as a potential next-generation technology for analog deep-learning applications. Proton, being the smallest ion, is very promising candidate to enable devices with high modulation speed, low energy consumption, and enhanced endurance. In this work, we report on first back-end CMOS-compatible nonvolatile protonic resistor enabled by integration of phosphosilicate glass (PSG) proton solid electrolyte layer. PSG an outstanding material that displays both excellent conduction electronic insulation characteristics. Moreover, it well-known within conventional Si fabrication, which enables precise deposition control scalability. Our scaled all-solid-state three-terminal show desirable characteristics in terms symmetry, retention, endurance, efficiency. Protonic glass, therefore, represent candidates realize nanoscale crossbar processors monolithic CMOS integration.